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元件加工
The optical element processing method according to claim 1, wherein a surface of the optical element is processed with an ion beam.
根据权利要求1的光学元件加工方法,其中,光学元件的表面利用离子束被加工。
FIG. 1B describes the optical element processing method according to the embodiment and is a plan view illustrating the optical element and the ion beam.
图1B描述根据该实施例的光学元件加工方法,并且是示出光学元件和离子束的平面图。
An optical element processing method in which an optical effective region of an optical element is processed by a processing unit scanning a processing region smaller than the optical effective region, the optical element processing method comprising
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