Membransensor-Array nach einem der vorhergehenden Ansprüche 5 bis 9, dadurch gekennzeichnet, dass die Stege (23) und ein Rahmenbereich (25) um die Stege im Vergleich zum verbleibenden Halbleitermaterial bevorzugt dotiert sind.
Membrane sensor array according to one of the preceding Claims 5 to 9, characterized in that the webs (23) and a frame region (25) around the webs are preferably doped in comparison with the remaining semiconductor material.
Verfahren zur Herstellung eines Membransensor-Arrays sowie Membransensor-Array
Examples are used only to help you translate the word or expression searched in various contexts. They are not selected or validated by us and can contain inappropriate terms or ideas. Please report examples to be edited or not to be displayed. Potentially sensitive, inappropriate or colloquial translations are usually marked in red or in orange.
No results found for this meaning.
Synonyms and analogies of "Membransensor-Array" in German
