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second laser beam source
Vertaling van "second laser beam source" in Chinees
第二激光束源
a second laser beam source configured to subsequently provide a second beam of laser radiation at the plasma generation location, the second beam of laser radiation being configured to vaporize debris particles arising from incomplete vaporization of the fuel droplet.
以及配置成随后在等离子体产生位置处提供第二激光束辐射的第二激光束源，第二激光束辐射配置成蒸发由燃料液滴的不完全蒸发引起的碎片颗粒。
A first laser beam from the first laser beam source 46 and a second laser beam from the second laser beam source 21 are emitted to an optical information medium 41.
来自第一激光束源46的第一激光束和来自第二激光束源21的第二激光束被发射到光学信息介质41。
An EUV radiation source comprising a fuel supply (200) configured to deliver a droplet of fuel to a plasma generation location (201), a first laser beam source configured to provide a first beam of laser radiation (205) incident upon the fuel droplet at the plasma generation location and thereby vaporizes the fuel droplet, and a second laser beam source configured to subsequently provide a second beam of laser radiation (205) at the plasma generation location, the second beam of laser radiation being configured to vaporize debris particles (252) arising from incomplete vaporization of the fuel droplet.
配置成提供第一激光束辐射（205）的第一激光束源，该第一激光束辐射在等离子体产生位置入射到燃料液滴上并由此蒸发燃料液滴； 以及配置成随后在等离子体产生位置处提供第二激光束辐射（205）的第二激光束源，第二激光束辐射配置成蒸发由燃料液滴的不完全蒸发产生的碎片颗粒（252）。
The EUV radiation source of claim 2, wherein the second laser beam source is configured such that a radiation pulse of the second beam of laser radiation is incident at the plasma generation location after a plasma formed by vaporization of the fuel droplet has decayed.
根据权利要求2或3所述的EUV辐射源，其中第二激光束源配置成使得在由燃料液滴的蒸发形成的等离子体已经衰退之后，第二激光束辐射的辐射脉冲入射到等离子体产生位置处。
a second collimating lens converting the second laser beam generated from the second laser beam source into the parallel ray
第二准直透镜，将从第二激光束源产生的第二激光束转换成平行光；
In the reproducing, the second laser beam source is used as a laser beam source emitting the reproduction laser beam and the laser beam for controlling the position of the object lens.
在再现过程中，第二激光束源被用作发射再现激光束和用于控制物镜的位置的激光束的激光束源。
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Resultaten: 6. Exact: 6. Verstreken tijd: 12 ms.
