INTERFEROMETRIC METHODS FOR DEVICE FABRICATION.
DYNAMIC INTERFEROMETRIC CONTROLLING DIRECTION OF INPUT BEAM
INTERFEROMETRIC SYSTEM FOR USE OF A SPECIAL LENSES
REDUCTION OF INTERFEROMETRIC NOISE IN AN OPTICAL NETWORK
INTERFEROMETRIC SENSOR AND METHOD TO DETECT OPTICAL FIELDS
METHOD AND SYSTEM FOR DRIVING INTERFEROMETRIC MODULATORS
INTERFEROMETRIC METHOD AND DEVICE FOR CHARACTERISING A MEDIUM
METHOD FOR MEASURING SURFACES USING AN INTERFEROMETRIC SYSTEM
INTERFEROMETRIC SYSTEM WITH REFERENCE SURFACES WITH A MIRRORED ZONE
OPTICAL APPARATUS FOR USE WITH INTERFEROMETRIC MEASURING DEVICES.
LASER INTERFEROMETER FOR THE INTERFEROMETRIC MEASURING OF LENGTH.
LASERINTERFEROMETER ZUR INTERFEROMETRISCHEN LÄNGENMESSUNG.
METHOD AND DEVICE FOR MEASURING ABSOLUTE INTERFEROMETRIC LENGTH
VERFAHREN UND EINRICHTUNG ZUR ABSOLUTEN INTERFEROMETRISCHEN LÄNGENMESSUNG
DEVICE AND METHOD FOR THE INTERFEROMETRIC MEASUREMENT OF PHASE MASKS
VORRICHTUNG UND VERFAHREN ZUR INTERFEROMETRISCHEN MESSUNG VON PHASENMASKEN