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A laser processing method capable of reliably forming a reformed region inside an object to be processed, along a desired portion of a planned cutting line.
Provided is a laser processing method for performing laser processing easily with high production efficiency by effectively reducing contamination of a surface of a material to be processed due to decomposed matter in the case of processing the material by a laser beam.
Provided is a laser processing method wherein particles are surely prevented from adhering on a chip obtained by cutting a board-shaped object to be processed.
A laser processing method in which a workpiece is prevented from being cut along a scheduled cut line with a reforming region as a cutting start point when a suction table and a holding member are separated.
The purpose of the present invention is to obtain a laser processing device and a laser processing method that can expand the range of processing hole diameter and the range of energy density.
A laser processing method is provided for highly accurately cutting a board and a stacked part, even when the board whereupon the stacked part including a plurality of functional elements is formed is thick.
A laser processing method by which especially a stacked part can be highly accurately cut at the time of cutting a processing object provided with a substrate and the stacked part which is formed on a front plane of the substrate by including a function element.
The purpose of the present invention is to obtain a laser processing device and a laser processing method, which are capable of cutting an object to be processed with a thickness using a laser having a short wavelength.
In this laser processing method, modified areas, which have different breakage generating performance to the substrate (4), are formed along each of cut planned lines (5a)-(5d).
Disclosed is a laser processing method for selectively removing an insulating layer of a printed circuit board, wherein the method does not use a wavelength conversion technique employing a nonlinear optical crystal, and can use only one wavelength over the entire removal process.
A laser processing method in which the sectional shape at a focusing point P of a laser beam L is such that a maximum length in a direction perpendicular to a scheduled cutting line (5) is shorter than a maximum length in a direction parallel to the scheduled cutting line (5).
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