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最小線幅
Equipment that can achieve a circuit of which the minimum line width of a line producing a pattern is 65 nanometers or less.
The standard at which the step-and-repeat projection exposure method becomes effective is for products that require an overlay accuracy of within ±30 μm and a minimum line width of within 50 μm.
Microprocessors, microcomputers, or microcontrollers with whose minimum line width 0.5 micrometers or more
最小線幅が〇・五マイクロメートル以上のもの
Equipment that can process a wafer to fit within the range of less than 10 % where the non-uniformity of the minimum line width of a line producing a pattern on the surface of the wafer, excluding the area 2 millimeters or less from the outside edge of the wafer, is 3 sigma distribution
Among plasma breeding chemical vapor deposition systems having cassette-to-cassette functions and load lock functions or systems designed to be connected to and used with equipment falling under (e), those that are used in the manufacture of semiconductor devices with a minimum line width of 65 nanometers or less
The technology (excluding programs) necessary for the design or manufacture of, among the core of the microprocessors, microcomputers, or microcontrollers, wherein the bit count of the access width of logic-operations is 32 or more, those falling under any of the following (excluding programs and the technology necessary for the design or manufacture of the core of the microprocessors, microcomputers, or microcontrollers with a minimum line width of 0.13 micrometers or more and multi-layer structures with five or less metal layers)
A method of dry etching, comprising exposing a resist film to radiation of 195 nm or less wavelength so as to form a resist pattern of 200 nm or less minimum line width and subjecting the resist pattern to dry etching using a fluorinated compound of C4-C6 having at least one unsaturated bond as an etching gas.
Equipment that contains a minimum line width of plus/minus 3 sigma distribution within a range of plus/minus 5%, and that can achieve a minimum line width of 180 nanometers or less.
Thanks to its combined high-power 355 nm YAG laser and four imaging heads, the DW-6000 achieves an outstanding output of 70 panels per hour at a minimum line width of just 5 μm.
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