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An imaging optical system capable of keeping a good imaging performance for an extended period substantially free from effect by compaction and damage by immersion liquid while ensuring a large effective image-side numerical aperture by interposing liquid in an optical path between the system and an image surface.
The illumination optical device includes polarization setting units (3, 7) arranged in the optical path between the light source and the surface to be irradiated, for setting the polarization state of the light reaching the surface to be irradiated, to a predetermined polarization state.
A slit-lamp microscope by which an observation object can be clearly observed even when a front end lens is inserted in an optical path between a subject's eye and an observation optical system.
An exposure apparatus for high-resolution projection exposure with a high throughput by using an easily producible projection optical system of refraction type and a mask having an ordinal size, disposing a high refractive index medium in the optical path between the projection optical system and a photosensitive substrate, and ensuring a large effective image-side numerical aperture.
The illumination optical equipment comprises polarization setting sections (4, 10) arranged in the optical path between the light source and the irradiation plane and setting the polarization state of a light reaching the irradiation plane to a specified polarization state, and a holding member for supporting one optical plane side of at least one light transmitting member constituting an optical system in the optical path between the light source and the irradiation plane at three points in three regions.
The mark unit (630) protrudes from the travel surface portion to the gap side at a predetermined position of the travel surface portion so as to be capable of blocking the optical path between the detection means and the reflection means.
When the refractive index of the atmosphere in the optical path of the projection optical path is 1, the optical path between the projection optical path and the photosensitive substrate is filled with a medium having a refractive index larger than 1.1.
This connector is provided with: a connecting terminal section having a terminal that outputs electric signals to an external apparatus and/or inputs the electric signals from the external apparatus; a connector section having a photoelectric conversion section that performs photoelectric conversion between optical signals and the electric signals; and a cable holding section, which holds an optical fiber that transmits the optical signals, and which has one or a plurality of cable holding section-side mirrors that form an optical path between the optical fiber and the photoelectric conversion section.
Compared with conventional image pickup devices having a dimming element disposed in a region on the image pickup element (3) side in the lens barrel device (i.e., a region on the optical path between the bent region and the image pickup element (3)), the optical path length (lens length) of the image pickup light to the image pickup element (3) is shortened by the length of a space for disposing the dimming element.
A projection type display device is provided with a light valve arranged for each of a plurality of color beams, a wire grid polarizer for analyzing the light modulated by the light valve, a projection lens for projecting the analyzed light, and a correcting member, which is arranged in an optical path between the light valve and the projection lens and corrects coma aberration due to the wire grid polarizer for a plurality of color beams.
Each of light transmitting members arranged in the optical path between the deflection setting unit and the surface to be irradiated is formed by an optical material having double refraction amount generated by internal distortion suppressed to 5 nm/cm or below.
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