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第2のアライメントマーク
A second alignment mark formed on a second object disposed on a second stage disposed opposite to the first stage via a light-transmitting area defined on the mark support and a first reference mark are concurrently detected by using a first alignment sensor disposed on the first stage.
In a liquid crystal display panel (1), at least the liquid crystal display panel (1) or a polarization plate (2) has an irregular planar shape other than a rectangular shape, and on an alignment film, a second alignment mark (3) is formed as a bonding mark for bonding the display panel on the polarization plate (2) by aligning the mark with a first alignment mark (4), which is arranged on the polarization plate (2) as a bonding mark.
The EL element-use sealing plate multiple-beveling mother glass substrate is mounted to a rectangular EL element-use glass substrate multiple-beveling mother glass substrate having a first alignment mark to constitute a plurality of EL displays, and has, in a position corresponding to the first alignment mark, a second alignment mark for aligning with the EL element-use glass substrate multiple-beveling mother glass substrate.
When the first alignment mark (11) and the second alignment mark (12) are viewed from the vertical direction with respect to the opposing surface of the interposer substrate (4a), they are apart from each other by a distance of a range allowing a bonding position when bonding the liquid crystal driver (3) to the interposer substrate (4a).
The semiconductor chip and the wiring cable are connected such that the position of the first alignment mark and the position of the second alignment mark correspond.
The mask has an exposure pattern with a pattern formed to be transferred to the exposed mask further includes a first alignment mark formed adjacent to a first side of the outer rim of the exposure pattern and a second alignment mark formed adjacent to a second side that faces the first side of the outer rim of the exposure first alignment mark is disposed so as not to overlap the second alignment mark when viewed in the direction of stepping.
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Synoniemen voor second alignment mark in het Engels