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fine-pattern
Vertaling van "fine-pattern" in Japans
微細パターン
PRODUCTION METHOD FOR 3-D MOLD, PRODUCTION METHOD FOR FINELY MACHINED PRODUCT, PRODUCTION METHOD FOR FINE-PATTERN MOLDED PRODUCT, 3-D MOLD, FINELY MACHINED PRODUCT, FINE-PATTERN MOLDED PRODUCT AND OPTICAL COMPONENT
Disclosed is a fine-pattern formation method using a post-fire method.
ポストファイア法によるファインパターン形成方法を提供する。
A 3-D mold in which its depth and line width can be formed with high precision, production methods for a finely machined product and a fine-pattern molded product, a 3-D mold formed with high precision, a finely machined product, a fine-pattern molded product and an optical element.
深さと線幅が高精度に形成できる３次元モールド、微細加工物及び微細パターン成形品の製造方法、高精度に形成された３次元モールド、微細加工物、微細パターン成形品及び光学素子の提供。
[PROBLEMS] To provide a chemical amplification type positive copolymer for semiconductor lithography which eliminates a drawback of the prior art, has a high development contrast, and has excellent resolution in fine-pattern formation; a composition for semiconductor lithography which contains the copolymer; and a process for producing the copolymer.
A production method for a 3-D mold capable of controlling a depth to within 10nm and forming a line width to up to 200nm, characterized in than the irradiation step of applying an electron beam to the resist layer of a work having on its substrate the resist layer formed of a polysiloxane material includes the steps of causing no back-scattering and having irradiation conditions requiring the acceleration voltage of 1kV to 3kV and the dosage of up to 400μC/cm2; a production method for a finely machined product using a 3-D mold; a production method for a fine-pattern molded product using a 3-D mold or a finely machined product; a 3-D mold formed with high precision by these production methods; a finely machined product; a fine-pattern molded product and an optical element.
基体上にポリシロキサン系材料で構成されるレジスト層を有する被加工体の該レジスト層に電子線を照射する照射工程が、後方散乱を発生させず且つ１ｋＶ乃至３ｋＶの前記加速電圧と、４００μＣ／ｃｍ2以下の前記ドーズ量を照射条件とする工程を含むことを特徴する１０ｎｍ以内の深さ制御と２００ｎｍ以下の線幅形成が可能な３次元モールドの製造方法、３次元モールドを用いる微細加工物の製造方法、３次元モールド又は微細加工物を用いる微細パターン成形品の製造方法、これら製造方法によって高精度に形成された３次元モールド、微細加工物、微細パターン成形品及び光学素子。
According to Tomita, demand for the fine-pattern material peaked during the seventeenth century, when the nation's daimyo lords competed for designs to make them stand out during gatherings in the capital, Edo, that were mandated by the Tokugawa shogunate every two years.
富田氏によれば、この微細模様の染物の需要がピークを迎えたのは17世紀であった。当時、徳川幕府は諸大名を江戸に1年おきに呼びよせていた。
Synoniemen voor fine-pattern in het Engels
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Resultaten: 6. Exact: 6. Verstreken tijd: 9 ms.
